- Conspectus
- Inquisitio
- Producta Relata



Nomen producti: |
Sulfur hexafluoridum |
Puritas: |
99.9-99.999% |
CAS No |
2551-62-4 |
NUMERUS EINECS |
219-854-2 |
MF: |
F6S |
Molar massa |
2551-62-4 |
UN No.: |
1080 |
Periculum Classis |
2.2 |
Aspectus: |
incolora |
Ocior: |
hyalina gas |
Item inspectionem |
unitas |
Puritas |
|
SF6 |
% |
≥99.999 |
≥99.99 |
O2+Ar |
ppmw |
≤2.0 |
≤10 |
N2 |
ppmw |
≤3.0 |
≤40 |
CF4 |
ppmw |
≤0.5 |
≤30 |
H2O |
ppmw |
≤2.0 |
≤10 |
HF |
ppmw |
≤40 |
≤0.3 |
THC(CH4) |
ppmw |
≤0.1 |
≤1.0 |
CO2 |
ppmw |
≤0.5 |
≤6 |
Co |
ppmw |
≤0.5 |
≤2 |
Applicatio:
Semiconductor |
Plasma etching. Etchant/refractio productum fluorinum plasma praestare potest etching |
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Medicina |
Anesthesia, elongatio retinae operationes reparandae, imaginatio ultrasound |
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Apparatus Electricus |
Summus intentione circa praevaricatores et gas insulatas switchgear |
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Proin systematis summus potentia |
Inflamat ductus undarum, Isolat ductum undarum, praeveniendo arcam internam |

Sarcina magnitudine |
40Ltr Cylinder |
47Ltr Cylinder |
50Ltr Cylinder |
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Implens Content/Cyl |
50KG |
52kg |
55-60kg |
||
QUANTUM in Container 20 pedum |
260Cyl |
260Cyl |
260Cyl |
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Valvae |
CGA580, CGA590, QF-2C |







