Air Gas Electronic Materials Enterprise Co., Ltd.

Ko te karihi C3F8, i tāwhai hoki hei octofluoropropane, kei te whanake hei mea matua i te wāhanga o ngā whakamātautau pūhanga. He karihi rerekē tēnei e āki ana i ngā hua pūhanga iti ake, tere ake, me ngā whananga ake. I ngā pātaka i hangaia ai ngā taputapu pūhanga pērā i ngā chip rorohiko, ka whakamahinga te C3F8 i te whakamātautau plasma etching. Ko tēnei hāhā e whakamārama i ngā wāhanga iti o ngā chip i te whānui o te whānui. I te whakamāhi i c3f8 urewera , ko ngā putanga he māma ake me ngā whananga ake. Nō reira ngā kamupene pērā i a AGEM e whiriwhiri ana i tēnei mō ō rātou whakamāhi. I te whanake tonu o te wāhanga pūhanga, ko te karihi C3F8 te kaiārahi i te whakamārama i ngā taputapu e mahi pai ake.

He aha ngā take e whakamārama ana i te hiranga o te karihi C3F8 mō te whakamātautau plasma etching?

Ko te C3F8 he hau whakamāhinga matua i te whakamāhinga plasma, nā te mea he pai ake tana mahi mō ngā āhua iti ki ngā mata. Ko te whakamāhinga plasma he ara hei whakamāhinga i ngā mea mai i tēnei mata i te whakamāhinga hau. Inā he plasma te C3F8, ka whakamāhinga i ngā ion e whakamāhinga ana i ngā kōwae i te tātai. He whakamāhinga tēnei mō ngā pīkau rorohiko, i reira me tātai ngā āhua iti. Kāore anō te hau e āwhina ana i te whakamāhinga anake, engari āki hoki i ngā wāhi kāore e hiahia ana. Nō reira, he iti ake ngā hapa o ngā pīkau, ā, he maha ngā take e pā ana ki tā rātou mahi. He tauira, he iti te hapa, ā, ka riro tonu te pīkau. I te C3F8, he iti ake ngā whāinga o ngā hapa, he pai mō ngā kaiwhakamahi. Ko tēnā anō te mea i c3f8 urewera i roto i te kanohi whakamāhinga ake i tēnei, ko ōna āhuatanga taiao. He iti ake tana whāinga i te whakamātautau o te ao, i ētahi atu hau whakamāhinga. Ko tēnei he tautoko i te taiao. Kua mātau ngā kamupene i ngā whāinga o ngā hāhanga, nō reira, he whakamārama te whirihanga i te C3F8. Ka hanga i ngā rorohiko kounga pai i tēnei ara kia māma i te taiao. I tēnei katoa, ko te hau C3F8 he matua i te whanonga o ngā rorohiko, e hanga ana i ngā rākau pai ake, me ngā rākau e whai pono ana.

Kei hea te tango i te hau C3F8 kounga teitei mō ngā rorohiko?

Mehemea e hiahia ana koe i te kaha o te hau C3F8 pai, ko AGEM he whirinaki tino pai. He nui te uara o te kounga i te whakamahi i ngā hau. Ka whakamātau te whakamātautau i te plasma me ngā hau māmā, ā, ka raru te whakamātautau katoa. Ko AGEM he rongonui mō ngā hau māmā me ngā hau e mahi ana i tēnei wāhi. I te whiwhi i te C3F8, tīpakitia he kaiwhakākākī e mōhio ana ki ngā hāinga o ngā whakamātautau. Ko AGEM e mahi ana i ngā kaiwhakamātautau hei whakarere i ngā hau tika, ā, ko tēnei e whakauru ana i te C3F8, ā, pērā anō i ētahi atu. Ko tēnei āhua pai a AGEM ko ō rātou āwhina i ngā kiritaki. E āwhina ana i ngā kiritaki ki te whakamārama i ngā tauira o ngā hau me ngā whakamātautau pai rawa. Ko tēnei āwhina he nui te uara, īnā ko ngā kaiwhakamātautau hōu. I tēnei, ka tukuna a AGEM i te wā, kāore he raru i te whakamātautau. He matua te whai i tēnei kaiwhakākākī o te C3F8, nā te mea he matua tēnei mō ngā rākau pūkenga. Ko te whiriwhiri i AGEM he whakamārama i tōu whakamārama i te kaha pai rawa, ā, e āwhina ana kia tū tonu i tēnei ao whakamātautau.

He aha ngā rerekētanga o te hau C3F8 i ngā hau ātārangi i te whakamātautau i te plasma?

Ko te kāpura C3F8, i tēnei wā he perfluoropropane, he mea matua mō te whakamāhinga o te plasma. Ko te whakamāhinga o te plasma he ara āhua rerekē hei whakamāhinga i ngā āhua iti tonu ki ngā pīkau me ngā rākau. I tēnei, ko te kāpura e huri ana ki te plasma, ā, ko tēnei he āhua o te hauwhenua e whakamāhinga ana, ā, he āhua o te kāpura. Ko te C3F8 he mea whakamāhinga pai, nā te mea he tino pūmau ōna hononga ki te silicon, te kāpura matua mō ngā rākau pūtaiao.

I te whakamātautau i te C3F8 ki ngā kāpura ātatahi, he rerekē ngā rerekē. Kāpura pērā i te SF6 me te CF4 hoki e whakamāhinga ana, engari he āhua rerekē te C3F8. He tauira, he iti ake te whānanga o te C3F8 ki te taiao i tēnei wā i ētahi atu. Ko tēnei he mea matua, nā te mea he whāinga a ngā kamupene pērā i a AGEM kia kāore ai ngā mahi pūtaiao i te whānanga i te ao. Ko tēnei anō he take pai, ko te whakamāhinga pai ake i te kāpura c3f8 s . Nō reira he iti ake ngā whakamāhinga e totohu ana, ā, he pai ake ngā hua.

I tēnei, ko te C3F8 he pai rawa mō ngā āhua iti o ngā pīkau. I te iti haere, te whanake hoki o ngā pūtaiao, he mea matua te kāpura whakamāhinga tātai. Nō reira, ko te C3F8 he rerekē i waenganui i ngā kaiwhakamāhi. I tēnei, ko te C3F8 he rerekē i tōna pai, i tōna whānanga iti ki te taiao, me tōna whakamāhinga mō ngā rākau pūtaiao koua kaha. I kitea e AGEM he whāinga kia whanake ake ngā hua o te ahumātua.

Kei hea ngā kaiwhakatoa kāpura C3F8 tūmatawhānui e whakamāhinga ana?

He tino pūmau te whiwhi i tēnei kaiwhakamātua o te C3F8 mō ngā kamupani e whakamāhi ana i tēnei. He hiahia ngā kaihoko mai i te whānui kia hāngai ki te whai kounga pai i ngā utu tika. Ko tēnei tēnā ara hei whāinga i te rapu i te ipurangi. He nui ngā rōpū e whai ana i ngā hauā o te pūhanga, ā, e whakamāhi ana i te C3F8. Tātaihia ngā wāhi ipurangi hei whāinga i ngā tohutohu, ngā utu, me ngā whakaahua a ngā kiritaki.

Ko tēnā anō he ara hei whāinga i ngā hui whakamātua me ngā hui ā-tāone. I reira, ka whakaatu ngā pakihi i ō rātou hua, ā, ka taea e koe te whakamārama i ngā kaiwhakamātua. Pātai ai i a rātou mō tā rātou C3F8 hei whāinga i te whakamārama i ngā kaiwhakamātua e tika ana. Ko AGEM, he tauira, he pūmau i te kounga me ngā ratonga, he pai rawa atu mō ngā kaihoko o te C3F8.

Whakaaro hoki i te whakamānuka i te whakamātua. Whakamārama kia tika ngā hauā e tū mai ana i te haerenga, ā, kia tū tonu. He āhua o ngā kaiwhakamātua he whakamāmā i ngā hauā kia mau tonu. Me pātai tonu i ngā take pūmau me ngā tikanga whakamānuka, nā reira ka hāngai ai te kounga o ngā hauā e tū mai ana. Me whakamārama, ā, ko te whakamātua tika he whakamārama i te whakamānuka tika o te C3F8 mō ngā mahi whakamātua.

He aha ngā whānanga hou i te hauā C3F8 e whakamārama ana i ngā pūhanga?

Ko te ahumārae hāngā pūhanga he rerekē tonu, ā, ko ngā whānanga i te waihanga o te kōpū hau C3F8 he wāhanga nui. Ko tēnei āhuatanga hou he whakamāngai i te whai hua o te whakamātūtū i te plasma. I tēnei whakamātautau hou, ka taea e ngā kaiwhakamahi te whakamāhi i te C3F8 hei whakamāngai i te wā me ngā rākau. Nā reira, ka whanake ake ngā whakamātautau, ka whanake ake ngā whakamātautau, ā, ka iti ake ngā rākau kāore i whakamāhinga. Ko AGEM te kaiwhakamāngai i ēnei, ā, he āwhina i ngā whakamātautau pai ake.

I tēnei hoki, kei te piki ake te whakamārama ki ngā ara kaitiaki taiao. Kei te rapu ngā kamupani i ngā hāhanga kaitiaki taiao. Kua whakamātauria te C3F8 hei whakamāngai i tana pānga ki te ao. Kua whakamātauria ngā ara hei whakamāhi anō, hei whakakī i te wāhi i te mutunga o te whakamāhi. He āwhina tēnei i te whakamāna i ngā ture, ā, he tohu hoki o te aroha ki te whenua. Ā, kei te whakamātautau ngā kairangahau i ngā whakamātautau o ngā hau me te C3F8. I te whakamāhi i ēnei kōpū hau, ka whai hua pai ake i te whakamātūtū. He whakamāngai ēnei i ngā whakamātautau tino mātātū i te iti ake o ngā rākau. Ka whakamāngai i te whanaketanga tonu o ngā hāngā pūhanga.

Hei whakamātautau, ko ngā whānanga i te C3F8 he rerekē tonu i ngā hāngā pūhanga. Mai i te whai hua ki te whakamārama ki ngā ara kaitiaki taiao, he āwhina ēnei i AGEM me ētahi atu kia kaiwhakamāngai. I te whanaketanga o ngā hāhanga, ka tātai hoki te C3F8 hei mea nui ake mō te tau kei muri.