High Purity 6N CF4 O2 Gas Mixture in Hydrogen Argon Balance for Semiconductor Plasma Etching Calibration

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This ultra-high purity 99.9999% (6N) Calibration Mixture is a specialized process gas solution engineered specifically for the rigorous demands of Semiconductor Plasma Etching and Advanced Thin-Film processes. By precisely blending Carbon Tetrafluoride (CF4) and Oxygen (O2) within a balanced matrix of Hydrogen (H2) and Argon (Ar), this mixture provides the exact chemical synergy required to control etch selectivity and profile anisotropy in sub-nanometer fabrication. The 6N-grade purity ensures that trace metallic impurities and moisture are virtually non-existent, preventing wafer contamination and significantly enhancing device yield for complex architectures like 3D NAND and FinFET.The inclusion of Argon provides the necessary ion bombardment energy for physical sputtering, while the Hydrogen/Oxygen ratio is meticulously calibrated to tune the polymer passivation layers, ensuring high-aspect-ratio trenches with perfectly vertical sidewalls. Every cylinder is prepared using advanced gravimetric mixing and undergo proprietary internal passivization to guarantee that these reactive components remain stable and do not deviate from the specified concentration over time. Provided with a comprehensive Certificate of Analysis (CoA) and traceable to international standards, this mixture is the ideal choice for R&D labs and high-volume semiconductor fabs requiring absolute consistency in their plasma chemistry. This "all-in-one" balanced mixture simplifies gas delivery systems by reducing the number of individual gas lines needed, thereby minimizing potential leak points and streamlining the mass flow control (MFC) calibration process.

About Us

AGEM was established in 2008 as a multinational professional manufacturer and service provider of gas equipment, headquartered in Taiwan, China. With 16 years of dedicated industry expertise, its global footprint, superior manufacturing craftsmanship, and comprehensive product portfolio have solidified its status as a benchmark enterprise in the gas equipment sector. The company adheres to a globalization development strategy, establishing modern production bases in Chinese Mainland, Taiwan, China, and India, forming a production and service network that covers Asia and extends globally. Each base is equipped with intelligent production lines and precision testing equipment, enabling full-process control from raw material processing to finished product delivery. With annual production capacity consistently ranking among industry leaders, the company can swiftly respond to the diverse needs of global clients. The core business focuses on gas-related core equipment, encompassing a full range of products including various industrial gases, specialized gas valves, high-pressure cylinders, lightweight aluminum cylinders, and high-precision pressure reducers. These products are widely applied in critical sectors such as chemicals, electronics, healthcare, and energy. Leveraging profound technical expertise, the products have obtained ISO9001 Quality Management System certification and multiple authoritative international certifications, including ASME certification for high-pressure equipment, CE-PED certification for EU market access, and IECEx explosion-proof certification for global application. Key performance indicators such as sealing performance, pressure resistance, and safety protection have achieved internationally advanced levels. The company consistently prioritizes technological innovation as its core competitive strength, assembling an international R&D team and continuously investing in technological breakthroughs.

FAQs

What is the lead time for custom 99.9999% (6N) purity mixtures?

For ultra-high purity (UHP) gases like CF4/O2, the typical lead time is 10-15 working days. This includes precision blending and multi-stage stability testing to ensure the 6N grade purity and concentration accuracy.

How do you guarantee the concentration accuracy of the CF4/O2 mixture?

We use the gravimetric method (high-precision weighing) during filling, which is the most accurate blending technique. Each cylinder is analyzed via Gas Chromatography (GC) and comes with a Certificate of Analysis (COA) traceable to NIST or national standards.

Is this mixture stable given it contains both Hydrogen H2and Oxygen O2?

Yes. We strictly follow safety blending protocols where the concentration of flammable and oxidative components is kept within safe limits or balanced with Argon (Ar) to ensure chemical stability and prevent any hazardous reactions inside the cylinder.

What type of cylinder and valve are used for this semiconductor gas?

We use internally passivated aluminum alloy cylinders or polished stainless steel cylinders to prevent surface adsorption. For 6N grade gases, we typically equip them with DISS (Digital Intelligent Scheduling System) 660 or SS 316L stainless steel valves to ensure zero leakage and prevent contamination.

What are the storage requirements for this gas mixture?

Cylinders should be stored in a cool, dry, and well-ventilated area, away from direct sunlight and heat sources (temperature < 50° C Ensure the cylinders are secured upright to prevent falling.

Do you provide worldwide shipping for hazardous gases?

Yes, we specialize in Class 2 hazardous goods logistics. We provide full documentation including MSDS (Material Safety Data Sheet), UN-certified packaging, and DG (Dangerous Goods) declarations for sea or air freight.