Excimer Laser Gas/Arf Premix Gas

All

• Mixture Gases

  • Excimer Laser Gas/Arf Premix Gas

• Etchants

  • GeH4
  • SiH4
  • SiF4
  • BF3
  • HBR
  • N2O
  • WF6
  • SO2
  • SF6

• Reactants

  • NO,Nitric Oxide
  • H2S
  • CO,Carbon Monoxide
  • NH3
  • HCL

• Hydrocarbons

  • C2H2
  • C3H8
  • CH4
  • C2H6
  • C3H6
  • C2H4
  • EO/ETO

• Bulk & Rare Gases

  • O2
  • CO2
  • Hydrogen
  • N2
  • Xenon
  • Neon
  • Krypton
  • Helium
  • Argon
  • CL2

• Halocarbons

  • C5F8
  • R508B
  • CHF3
  • C4F8
  • CH3F
  • C2F6
  • C4F6
  • CH2F2
  • CF4
  • C3F8

• Refrigerant Gas

  • R290
  • R170
  • R508B

• Gas Equipment

  • Pump
  • Cylinder rack
  • Gas cablinet
  • Oxygen regulator
  • VMB
  • ISO Tank
  • Cylinder Cap
  • Valve
  • Aluminium Cylinder
  • Steel Cylinder

• Other Chemicals

  • Cream charger
  • AlH3