Te hau tāwhai pūmau o te CF4 O2 i te 6N, i te hydrogen me te argon hei tāwhai mō te whakamātautau o te whakamātautau i ngā wāhi o te semiconductor

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Whakaahuatia

Ko tēnei Whakaranu Whakaranu tino-nui 99.9999% (6N) he rongoā hau tukanga motuhake i hangaia motuhake mo nga whakaritenga tino nui o te Hurihanga Plasma Semiconductor me nga tukanga Puka-Puku Matatau. Mā te whakaranu tika i te Carbon Tetrafluoride (CF4) me te Oxygen (O2) i roto i tētahi matatini ōrite o te Hydrogen (H2) me te Argon (Ar), ka whakaratohia e tēnei ranunga te mahi tahi matū tika e hiahiatia ana hei whakahaere i te tīpakonga o te kōpaki me te anis Ko te 6N-grade purity e whakarite ana kia kore e kitea nga poke whakarewa me te makuku, e aukati ana i te whakapoke i te wafer me te whakanui ake i te hua o te taputapu mo nga hoahoanga matatini penei i te 3D NAND me te FinFET. Ko te whakauru o Argon e whakarato ana i te kaha Ka hangaia ia ipu mā te whakamahi i te whakaranu taumaha matatau, ā, ka whakahaeretia ki roto i te pūkaha kia mau tonu ai ēnei wāhanga urupare, ā, kia kore e peka atu i te kaha kua whakaritea i te wā. I te whakaratohia ki tētahi Tiwhikete Arotake whānui (CoA) me te whai i ngā paerewa o te ao, ko tēnei ranunga te kōwhiringa pai mō ngā taiwhanga R&D me ngā wheketere haurua-kaituku nui e hiahia ana ki te ōritetanga tino i roto i to rātau matū plasma. Ko tēnei ranunga ōrite "katoa-i roto i te kotahi" e māmā ana i ngā pūnaha tuku hau mā te whakaiti i te maha o ngā raina hau takitahi e hiahiatia ana, nā reira ka whakaiti i ngā wāhi rere ā-motu, ā, ka whakaiti i te tukanga whakatikatika i te mana o te rerenga papatipu (

Mō Tātou

I tīmata a AGEM i te tau 2008 hei kaiwhakamahi pūkenga o ngā taputapu hau, he kaiwhakamāhi me te kaiwhakamātautau i ngā taputapu hau i te ao, ā, ko tōna whare matua kei Tāiwan, Tāiwhān. I ngā tau e 16 e tātari ana, ko ngā pūkenga maha o te rārangi o ngā mahinga, ko ngā wāhi o tēnei ao i rere mai ai, ko ngā pūkenga o te whakamāhi i ngā taputapu, me ngā hua o ngā hua, i whakamāhinga ai i tēnei kamupene hei tauira o ngā kamupene o ngā taputapu hau. Ko te rautaki o tēnei kamupene he rautaki whānui, ā, kua whakamahinga ngā wāhi whakamāhi hou i te Tāiwhān, i Tāiwan, i Tāiwhān, me Hindī, ā, kua hanga ai i tēnei rārangi o ngā wāhi whakamāhi me ngā wāhi whakamātautau e whānui ana i Āwherika me ngā wāhi katoa o te ao. Kua whakamāhinga ngā rārangi whakamāhi mātātoko me ngā taputapu whakamātautau matau i ngā wāhi katoa, ā, ka taea te whakamārama i te hāpua katoa mai i te whakamāhi i ngā kōpae tuatahi ki te whakamāhi i ngā hua mutunga. I te whakamāhi i ngā tau, ko ngā hua o tēnei kamupene i rere mai ai i ngā kamupene o te ao, ā, ka taea te whakautu tūmatanui ki ngā hiahia maha o ngā kiritaki o te ao. Ko ngā mahi matua he whakamāhi i ngā taputapu hau matua, ā, he rārangi whānui o ngā hua, ā, he rārangi o ngā hau tāpoi, ngā vālā hau mātātoko, ngā pūtā hau paku, ngā pūtā hau paku mātātoko, me ngā kōhanga hau matau. Ko ēnei hua e whānui ana i ngā wāhi matua o ngā hāpua, o ngā whakamātautau, o ngā ratonga hauora, me ngā hāpua hauora. I te whakamāhi i ngā pūkenga maha o te pūnaha, kua whiwhi ngā hua i te whiwhinga o te whiwhinga o te ISO9001 mo ngā pūnaha whakamārama kounga, me ngā whiwhinga maha o ngā whiwhinga o te ao, ā, ko ngā whiwhinga o te ASME mo ngā taputapu hau paku, ko ngā whiwhinga o te CE-PED mo te uru mai ki te rārangi o te Eropi, me ngā whiwhinga o te IECEx mo ngā whakamāhi o te ao. Ko ngā tohu matua o te whakamāhi, ā, ko ngā tohu o te whakamārama, o te whakamārama i ngā paku, me ngā tohu o te whakamārama i ngā rārangi, kua rere mai ai i ngā tohu o te ao. Ko te whakamāhi i ngā pūkenga hou he take matua o tēnei kamupene, ā, kua hanga ai i tēnei rārangi o ngā kairangahau o te ao, me ngā whakamātautau maha i ngā pūkenga hou.

Ngā Pātai Tāpiri

He aha te wā tuku mō ngā ranunga 99.9999% (6N) te māmā?

Mō ngā hau tino māmā (UHP) pēnei i te CF4/O2, ko te wā tuku noa ko te 10-15 rā mahi. Kei roto i tēnei te whakaranu tika me te whakamātautau pūmautanga maha-taahiraa hei whakarite i te ma o te reanga 6N me te tika o te kaha.

Me pēhea te whakarite i te tika o te pūngao o te ranunga CF4/O2?

Ka whakamahia e mātou te tikanga taumaha (te taumaha tino tika) i te wā e whakakii ana, ko te tikanga whakaranu tino tika. Ka tātarihia ia ipu mā te Gas Chromatography (GC) ka haere mai me tētahi Tiwhikete Arotake (COA) e taea ana te kimi ki te NIST, ki ngā paerewa ā-motu rānei.

He pūmau tēnei ranunga i te mea kei roto i a ia te Hydrogen H2 me te Oxygen O2?

Ae, he pai. Ka tino whai mātou i ngā kawa whakaranu haumaru e pupuri ana i te kaha o ngā wāhanga mura me ngā wāhanga waikura i roto i ngā rohe haumaru, i te ōritetanga rānei ki te Argon (Ar) hei whakarite i te pūmautanga matū me te ārai i ngā urupare mōrearea i roto i te ipu.

He aha te momo ipu me te piha e whakamahia ana mō tēnei hau haurua?

Ka whakamahia e mātou ngā ipu konumohe konumohe i roto i te whare, ngā ipu maitai rānei hei ārai i te whakaurunga o te mata. Mō ngā hau o te taumata 6N, ka whakauruhia e mātou ki ngā kōpae DISS (Digital Intelligent Scheduling System) 660 SS 316L rānei hei whakarite kia kore te rere me te ārai i te poke.

He aha ngā whakaritenga rokiroki mō tēnei ranunga hau?

Me rokiroki ngā ipu i tētahi wāhi hauhautanga, maroke, hauhautanga pai, i tawhiti atu i te ra me ngā puna wera (te pāmahana < 50° C. Me whakarite kia tū tika ngā ipu kia kore ai e hinga.

E whakarato ana rānei koe i te kaipuke o te ao mō ngā hau mōrearea?

Ae, he tohunga mātou ki te rerenga taonga mōrearea o te Kāwai 2. Ka whakaratohia e mātou he tuhinga katoa tae atu ki te MSDS (Material Safety Data Sheet), te tākai kua whakamanahia e te UN, me ngā whakapuakitanga a te DG (Dangerous Goods) mō te kawe moana, waka rererangi rānei.