Whakaahuatia
Te purenga o te rārangi pūhanga mō te whananga o ngā kāhui hāngai Tā mātou C4F6 e wānanga ana i ngā rārangi purenga tino teitei, ā, he 5N, 99.999 ōrau, ā, he iti tonu ngā rārangi o ngā kōpae kāore i te hāngai, tēnei i roto i te hauā (O2), te wai (H2O) me ngā karbonohidro, ā, he whakamārama pai ake i te tatau o te plasma, te whananga tāwhai o te whakamātautau, me te whananga tāwhai o ngā hāngai, ā, he hāngai nui mō te whananga o ngā kāhui hāngai mātua. I whakamāmāhia mō ngā whakamātautau plasma mātua: Ko te C4F6 i whakamāmāhia mō ngā whakamātautau plasma mātua, ā, ko ngā whakamātautau whakamātautau hāngai, te whakamātautau o ngā rārangi o te oksīti, te whakamātautau o ngā rārangi kītahi, me te whakamātautau o ngā tāwhai o ngā tāwhai, ā, he pai ake ngā whakamātautau o te whakamātautau, ngā whakamātautau o te whakamātautau anisotropic, me ngā whakamātautau o te whakamātautau o ngā tāwhai i ngā rārangi fluorocarbon tātai, tēnei i roto i te CF4, te C2F6 me te C3F8, ā, he rārangi pai mō ngā whananga o ngā kāhui hāngai mātua, o ngā kāhui hāngai, me ngā MEMS. He whakamāngai iti o te whakamāngai o te ao (GWP): I tēnei i ngā rārangi perfluorocarbon tātai, ko te C4F6 he pai ake i te whakamātautau, he iti ake te whakamātautau o te hauā, me te iti ake o ngā pānga ki te taiao, ā, he āwhina i ngā kaiwhananga o ngā kāhui hāngai kia eke ki ngā whāinga o te whakamāngai, ā, kia mau tonu i ngā whananga pai me ngā whāinga. Te whakamāmāhanga o ngā kōpae me ngā rārangi o te wai: Ka whakamāhi mātou i ngā rārangi whakamāmāhanga hauā, ngā rārangi whakamāmāhanga tātai, me ngā tikanga whakamāmāhanga kounga kia whakamāmāhia ai te wai (H2O) he iti ake i te 1 ppm, te hauā (O2) he iti ake i te 1 ppm, me ngā karbonohidro katoa he iti ake i te 1 ppm, ā, he whakamāmāhanga pai ake i te whakamāmāhanga o ngā papa, te tatau o te plasma, me ngā pānga o te hāngai, ā, he whakamāmāhanga tāwhai me te whakamāmāhanga tāwhai o ngā whananga o ngā kāhui hāngai. Ngā pākete kōrero i te rārangi kāhui hāngai: Ko tā mātou C4F6 e tāwhai ana i ngā pākete tātai 47L, 10L, me ngā rārangi pākete kōrero, ā, i hanga mai i runga i ngā whakamātautau ISO 9809, DOT 3AA me ngā whakamātautau TPED EN, ā, he rārangi kōrero i roto i te whakamāmāhanga electropolishing me te whakamāmāhanga passivation hei whakamāmāhanga i te whakamāmāhanga o ngā pākete, hei whakamāmāhanga i te whakamāmāhanga o te hauā, me te whakamāmāhanga o te purenga tino teitei o te hauā i te whakamāmāhanga me te whakamāmāhanga.