For Excimer Laser H2 CO N2 Xe Mixture 99.999% Gas Hydrogen Carbon Monoxide Nitrogen Xenon Mixtures Calibration Gases
- Overview
- Inquiry
- Related Products

Carbon Monoxide - CO |
available upon request |
Hydrogen - H2 |
available upon request |
Helium - He |
available upon request |
Nitrogen - N2 |
Balance |
Maximum Impurities |
||
COMPONENT |
CONCENTRATION - ppmv |
|
Carbon Dioxide - CO2 |
<0.5<>
|
|
Carbon Monoxide - CO |
<0.5<>
|
|
Helium - He |
<8.0<>
|
|
Moisture - H2O |
<0.5<>
|
|
Nitrogen - N2 |
<1.0<>
|
|
Oxygen - O2 |
<0.5<>
|
|
Xenon - Xe |
<1.0<>
|
|
Cylinder Specifications* |
Contents |
Pressure |
||||||||
Cylinder |
Valve Out Options |
Cubic Feet |
Liters |
PSIG |
BAR |
|||||
1 |
CGA 580 |
DISS 718 |
265 |
7500 |
2000 |
139 |
||||
2 |
CGA 580 |
DISS 718 |
212 |
6000 |
2000 |
139 |
||||
3 |
CGA 580 |
DISS 718 |
71 |
2000 |
1800 |
125 |
||||




For Excimer Laser H2 CO N2 Xe Mixture 99.999% Gas Hydrogen Carbon Monoxide Nitrogen Xenon Mixtures Calibration Gases — AGEM presents a high-performance excimer laser gas mixture designed for precision optical manufacturing, calibration, and research applications. Our excimer laser gas mixture combines hydrogen, carbon monoxide, nitrogen, and xenon at ultra-high purity levels to meet the stringent demands of excimer laser systems, calibration protocols, and specialty process environments. AGEM’s excimer laser gas mixture is formulated to deliver consistent laser output, extended component lifetime, and reliable calibration performance, making it a preferred choice among semiconductor Fabs, photonics labs, and advanced manufacturing facilities.
Product Overview and Features
The AGEM excimer laser gas mixture is a meticulously balanced blend of H2, CO, N2, and Xe at 99.999% total gas purity. This excimer laser gas mixture is engineered for stable discharge characteristics, reproducible pulse energy, and minimal contaminant introduction to laser optics and gas-handling systems. As a high-purity calibration gas offering, our excimer laser gas mixture is subject to rigorous quality control and testing to ensure trace-level impurities remain below critical thresholds for excimer laser operation and calibration tasks.
Key features:
- Ultra-high purity: 99.999% specification ensures the excimer laser gas mixture reduces optical contamination and maintains consistent laser performance.
- Precise composition: Controlled ratios of hydrogen, carbon monoxide, nitrogen, and xenon to optimize excimer laser wavelength stability and energy output.
- Stable discharge behavior: Formulation minimizes discharge instabilities and supports reproducible laser pulses for calibration and processing.
- Low impurity profiles: High-purity calibration gases standards with tightly measured trace contaminants for sensitive applications.
- Compliance and documentation: Certified test reports, material safety data, and compliance with gas safety compliance norms to facilitate safe handling and regulatory adherence.
Applications and Use Cases
AGEM’s excimer laser gas mixture is suitable for a variety of demanding applications where a reliable, high-performance gas blend is critical. Typical applications include excimer laser lithography, photochemical processing, microfabrication, optical material testing, and laboratory calibration work. As high-purity calibration gases, these mixtures are also ideal for instrument validation, metrology, and process qualification where traceable, consistent gas standards are required.
Specific application examples:
- Excimer laser lithography: The excimer laser gas mixture supports stable pulse energies and wavelength fidelity necessary for high-resolution photolithography in semiconductor manufacturing.
- Laser-based microfabrication: Precision ablation and patterning techniques rely on consistent excimer laser gas mixture behavior to ensure repeatable results.
- Optical component testing: High-purity calibration gases enable accurate testing and verification of optics, coatings, and gain media under controlled atmospheres.
- Research and development: Photonics and laser research labs benefit from reproducible excimer laser gas mixture properties for experiments and prototype development.
- Instrument calibration: High-purity calibration gases are used to calibrate gas sensing, flow control, and analytical instrumentation to maintain measurement accuracy.
Innovation and Technical Advantages
AGEM leverages decades of expertise in specialty electronic gases and calibration gases to deliver an excimer laser gas mixture with technical advantages that drive performance and reliability. Our research-driven approach focuses on formulation precision, contamination control, and process reproducibility. The excimer laser gas mixture benefits from advanced gas blending techniques, precision metering, and clean filling environments to preserve gas purity and mixture stability.
Technical advantages include:
- Advanced blending accuracy: State-of-the-art mixing systems ensure the excimer laser gas mixture achieves exact component ratios and homogeneity across production batches.
- Trace-level impurity control: Clean-room filling and high-sensitivity analytical testing reduce contaminants that can degrade laser optics and calibration accuracy, distinguishing our high-purity calibration gases from commodity alternatives.
- Thermal and chemical stability: The excimer laser gas mixture is optimized to maintain composition stability over time and under expected storage and usage conditions, reducing the need for frequent gas replacement.
- Quality assurance: Each batch of excimer laser gas mixture undergoes comprehensive testing and certification to document compliance with specifications and to provide customers with traceable high-purity calibration gases records.
- Customization capabilities: AGEM can tailor excimer laser gas mixture ratios and packaging options to meet specific system requirements, offering specialty electronic gases solutions aligned with customer process needs.
Safety, Handling, and Compliance
Safety is an integral part of AGEM’s production and delivery of excimer laser gas mixture and high-purity calibration gases. Our gas safety compliance practices encompass rigorous labeling, documentation, and supply chain controls. AGEM provides detailed material safety data sheets, handling instructions, and regulatory documentation to support safe operation in laboratories and production environments. The excimer laser gas mixture is supplied in certified cylinders and packaging options that meet transport and storage regulations, and our personnel are trained in gas safety compliance procedures to support customers in implementing safe gas use policies.
Why AGEM
AGEM (AIR GAS ELECTRONIC MATERIALS) is a Taiwan-based manufacturer with deep RD capabilities and a dedication to specialty electronic gases and calibration gases. Our focus on high-purity formulations, rigorous inspection, and global service enables customers to rely on AGEM as a dependable provider of excimer laser gas mixture solutions. We serve six regions worldwide and combine technical expertise with responsive customer support to ensure our excimer laser gas mixture meets demanding application requirements.
Ordering, Support, and Custom Services
Customers can request standard or customized excimer laser gas mixture compositions, cylinder sizes, and certification packages. AGEM’s technical team assists with gas selection, purity level recommendations, and application-specific guidance to optimize excimer laser gas mixture performance and integration. Comprehensive documentation, including certificates of analysis and safety data, accompanies every shipment of high-purity calibration gases to support compliance-driven operations.
AGEM’s For Excimer Laser H2 CO N2 Xe Mixture 99.999% Gas is a purpose-built excimer laser gas mixture that combines precision formulation, ultra-high purity, and robust quality control to meet the needs of laser manufacturers, semiconductor Fabs, and research laboratories. Backed by AGEM’s specialty electronic gases expertise and commitment to gas safety compliance, this high-purity calibration gases solution delivers the stability, repeatability, and documentation required for critical optical and calibration applications. Contact AGEM to discuss customized excimer laser gas mixture solutions and to access certified high-purity calibration gases for your excimer laser and calibration needs.
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