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Product Name: |
Sulfur hexafluoride |
Purity: |
99.9-99.999% |
CAS No |
2551-62-4 |
EINECS No |
219-854-2 |
MF: |
F6S |
Molar mass |
2551-62-4.mol |
UN No.: |
1080 |
Hazard Class |
2.2 |
Appearance: |
colorless |
Odor: |
colorless gas |
Inspection item |
unit |
Purity |
|
SF6 |
% |
≥99.999 |
≥99.99 |
O2+Ar |
ppmw |
≤2.0 |
≤10 |
N2 |
ppmw |
≤3.0 |
≤40 |
CF4 |
ppmw |
≤0.5 |
≤30 |
H2O |
ppmw |
≤2.0 |
≤10 |
HF |
ppmw |
≤40 |
≤0.3 |
THC(CH4) |
ppmw |
≤0.1 |
≤1.0 |
CO2 |
ppmw |
≤0.5 |
≤6 |
CO |
ppmw |
≤0.5 |
≤2 |
Application:
Semiconductor |
Plasma etching. Etchant/breaking down product fluorine plasma can perform the etching |
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Medicine |
Anesthesia, Retinal detachment repair operations,Ultrasound imaging |
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Electrical equipment |
High-voltage circuit breakers and gas insulated switchgear |
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High-power microwave systems |
Pressurizes waveguides, Insulates the waveguide, preventing internal arcing |

Package Size |
40Ltr Cylinder |
47Ltr Cylinder |
50Ltr Cylinder |
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Filling Content/Cyl |
50kg |
52kg |
55-60kg |
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QTY in 20 feet Container |
260Cyl |
260Cyl |
260Cyl |
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Valve |
CGA580, CGA590, QF-2C |







