Excimer Laser Gas/Arf Premix Gas

Lahat

• Mga Gas Mixture

  • Excimer Laser Gas/Arf Premix Gas

• Etchants

  • GeH4
  • SiH4
  • SiF4
  • BF3
  • HBR
  • N2O
  • WF6
  • SO2
  • SF6

• Mga Reactant

  • NO,Bistido Nitrico
  • H2S
  • CO,Monokso Karbon
  • NH3
  • HCL

• Hidrokarbon

  • C2H2
  • C3H8
  • CH4
  • C2H6
  • C3H6
  • C2H4
  • EO/ETO

• Bulk at Rare Gases

  • O2
  • CO2
  • Hidroheno
  • N2
  • Xenon
  • Neon
  • Kripton
  • Helyo
  • Argon
  • CL2

• Halokarbono

  • C5F8
  • R508B
  • CHF3
  • C4F8
  • CH3F
  • C2F6
  • C4F6
  • CH2F2
  • CF4
  • C3F8

• Gas ng Refrisyer

  • R290
  • R170
  • R508B

• Kagamitan ng Gas

  • Bomba
  • Rack ng Silinder
  • Cablinet ng Gas
  • Regulador ng Oksiheno
  • VMB
  • ISO Tank
  • Kap ng Silinder
  • Pintig
  • Silinder ng Aluminio
  • Silinder ng Tanso

• Iba Pang Kimikal

  • Kargador Ng Cream
  • AlH3